Piezoceramic scanners on the basis of planar bimorph piezoelements for scanning probe nanomicroscopes

Authors

  • V. Sharapov
  • R. Kažys
  • A. Vladišauskas
  • S. Filimonov

Keywords:

nanotechnology, scanning probe microscopy, piezoceramic scanner.

Abstract

The analysis of some constructions of piezoceramic scanners is carried out. It was found, that the basic shortcomings of known constructions of scanners are strong asymmetry of a construction and an interconnection between actuators on coordinates XYZ. The construction piezoscanner on the basis of planar of bimorph elements in which these drawbacks are eliminated is developed. The scanning range along the coordinates X and Y is increased up to 350 μm, and along the coordinate Z – 40 μm.

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Published

2010-03-16

Issue

Vol. 65 No. 1 (2010)

Section

ULTRASONIC TRANSDUCERS

License

Copyright terms are indicated in the Republic of Lithuania Law on Copyright and Related Rights; Articles 4-37.
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